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BSP 8110

BSP 8110 is suitable for a range of technical nodes, including logic circuits, memory, and other metal barrier layer polishing

Alkaline barrier layer grinding fluid designed for multiple integrated solutions using low-K dielectrics

Adjustable copper metal and low-k/ULK removal rate

High purity grinding particles

Low surface defects and residues

The formula has adjustability and can meet the specific performance needs of customers